PREFERENTIAL SPUTTERING.

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作者：
Shimizu, Ryuichi [1 ]
机构：
[1] Osaka Univ, Suita, Jpn, Osaka Univ, Suita, Jpn
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B18卷 / 4-6期
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页码：486 / 495
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