STUDY OF HYDROGENATED AMORPHOUS SILICON DEPOSITED BY rf GLOW DISCHARGE IN SILANE-HYDROGEN MIXTURES.

被引：0

作者：

Vanier, P.E. ^{[1
]}

Kampas, F.J. ^{[1
]}

Corderman, R.R. ^{[1
]}

Rajeswaran, G. ^{[1
]}

机构：

[1] Division of Metallurgy and Materials Science, Brookhaven National Laboratory, Upton, NY 11973, United States

来源：

| 1812年 / 56期

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[1] A STUDY OF HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY RF GLOW-DISCHARGE IN SILANE-HYDROGEN MIXTURES
VANIER, PE
KAMPAS, FJ
CORDERMAN, RR
RAJESWARAN, G
JOURNAL OF APPLIED PHYSICS, 1984, 56 (06) : 1812 - 1820
[2] A PDS STUDY OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY RF GLOW-DISCHARGE FROM SILANE-HYDROGEN MIXTURES
VANOORT, RC
GEERTS, MJ
VANDENHEUVEL, JC
PAYSON, JS
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 1427 - 1430
[3] Structural, optical, and electronic properties of hydrogenated polymorphous silicon films deposited from silane-hydrogen and silane-helium mixtures
Saadane, O. (saadane@lgep.supelec.fr), 1600, American Institute of Physics Inc. (93):
[4] Structural, optical, and electronic properties of hydrogenated polymorphous silicon films deposited from silane-hydrogen and silane-hellum mixtures
Saadane, O
Lebib, S
Kharchenko, AV
Longeaud, C
Cabarrocas, RRI
JOURNAL OF APPLIED PHYSICS, 2003, 93 (11) : 9371 - 9379
[5] A STUDY OF HYDROGENATED AMORPHOUS-SILICON DEPOSITED BY HOT-WALL GLOW-DISCHARGE
BOULITROP, F
PROUST, N
MAGARINO, J
CRITON, E
PERAY, JF
DUPRE, M
JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) : 3494 - 3498
[6] DRIFT MOBILITY MEASUREMENTS OF GLOW-DISCHARGE DEPOSITED AMORPHOUS HYDROGENATED SILICON
ROSENBLUM, MP
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1981, 26 (03): : 313 - 313
[7] AN OPTICAL-EMISSION STUDY OF THE GLOW-DISCHARGE DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON FROM ARGON-SILANE MIXTURES
KAMPAS, FJ
JOURNAL OF APPLIED PHYSICS, 1983, 54 (05) : 2276 - 2280
[8] GROWTH AND PROPERTIES OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON CARBON ALLOYS FROM SILANE PROPANE MIXTURES
QAYYUM, A
WILSON, JIB
IBRAHIM, K
ALSABBAGH, SK
EICKER, U
THIN SOLID FILMS, 1988, 164 : 221 - 226
[9] RAMAN-STUDY ON THE SILICON NETWORK OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY A GLOW-DISCHARGE
HISHIKAWA, Y
WATANABE, K
TSUDA, S
OHNISHI, M
KUWANO, Y
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (04): : 385 - 389
[10] Hydrogenated amorphous silicon by d.c. plasma glow discharge of argon diluted silane
Rahman, SA
Azis, A
Lim, CK
PLASMA PHYSICS, 2003, 669 : 361 - 364

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