Electrical evaluation of defects induced in silicon by high energy boron ion implantation

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[1] Sayama, Hirokazu
[2] Takai, Mikio
[3] Akasaka, Youichi
[4] Tsukamoto, Katsuhiro
[5] Namba, Susumu
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Sayama, Hirokazu | 1673年 / 28期
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