Metalorganic vapor phase epitaxial growth of GaNAs using tertiarybutylarsine (TBA) and dimethylhydrazine (DMHy)

被引:0
|
作者
Moto, Akihiro [1 ]
Tanaka, So [1 ]
Ikoma, Nobuyuki [2 ]
Tanabe, Tatsuya [1 ]
Takagishi, Shigenori [1 ]
Takahashi, Mitsuo [2 ]
Katsuyama, Tsukuru [2 ]
机构
[1] Basic High-Technology Laboratories, Sumitomo Electric Industries, Ltd., 1-1-1 Koya-kita, Itami, Hyogo 664-0016, Japan
[2] Optoelectronics R and D Laboratories, Sumitomo Electric Industries, Ltd., I Taya-cho, Sakae-ku, Yokohama 244-8588, Japan
关键词
D O I
暂无
中图分类号
学科分类号
摘要
Semiconducting gallium arsenide
引用
收藏
页码:1015 / 1018
相关论文
共 50 条
  • [41] Tertiarybutylarsine for Metalorganic Chemical Vapor Deposition Growth of High Purity, High Uniformity Films
    H. C. Chui
    R. M. Biefeld
    B. E. Hammons
    W. G. Breiland
    T. M. Brennan
    E. D. Jones
    H. K. Moffat
    M. H. Kim
    P. Grodzinski
    K. H. Chang
    H. C. Lee
    Journal of Electronic Materials, 1997, 26 : 37 - 42
  • [42] GaN/GaAs(100) superlattices grown by metalorganic vapor phase epitaxy using dimethylhydrazine precursor
    Sormunen, J
    Riikonen, J
    Sopanen, M
    Lipsanen, H
    JOURNAL OF CRYSTAL GROWTH, 2004, 270 (3-4) : 346 - 350
  • [43] Epitaxial growth of lithium niobate film using metalorganic chemical vapor deposition
    Akiyama, Yasunobu
    Shitanaka, Katsuya
    Murakami, Hiroshi
    Shin, Young-Sik
    Yoshida, Michihide
    Imaishi, Nobuyuki
    THIN SOLID FILMS, 2007, 515 (12) : 4975 - 4979
  • [44] Thermodynamic study on metalorganic vapor-phase epitaxial growth of group III nitrides
    Tokyo Univ of Agriculture and, Technology, Tokyo, Japan
    Jpn J Appl Phys Part 2 Letter, 9 A-B (L1136-L1138):
  • [45] Heteroepitaxial metalorganic vapor phase epitaxial growth of InP nanowires on GaP(111)B
    Watanabe, Y
    Bhunia, S
    Fujikawa, S
    Kawamura, T
    Nakashima, H
    Furukawa, K
    Torimitsu, K
    THIN SOLID FILMS, 2004, 464 : 248 - 250
  • [46] Metalorganic vapor phase epitaxial growth of (211)B CdTe on nanopatterned (211)Si
    Shintri, Shashidhar
    Rao, Sunil
    Schaper, Charles
    Palosz, Witold
    Trivedi, Sudhir
    Semendy, Fred
    Wijewarnasuriya, Priyalal
    Bhat, Ishwara
    PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 9, NO 8-9, 2012, 9 (8-9): : 1716 - 1719
  • [47] Selective area growth and epitaxial lateral overgrowth of GaN by metalorganic vapor phase epitaxy and hydride vapor phase epitaxy
    Hiramatsu, K
    Matsushima, H
    Shibata, T
    Kawagachi, Y
    Sawaki, N
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1999, 59 (1-3): : 104 - 111
  • [48] Metalorganic chemical vapor deposition of GaNAs alloys using different Ga precursors
    Wei, X
    Wang, GH
    Zhang, GZ
    Zhu, XP
    Ma, XY
    Chen, LH
    JOURNAL OF CRYSTAL GROWTH, 2002, 236 (04) : 516 - 522
  • [49] A THEORY FOR METALORGANIC VAPOR-PHASE EPITAXIAL SELECTIVE GROWTH ON PLANAR PATTERNED SUBSTRATES
    FUJII, T
    EKAWA, M
    YAMAZAKI, S
    JOURNAL OF CRYSTAL GROWTH, 1995, 146 (1-4) : 475 - 481
  • [50] Metalorganic vapor phase epitaxial growth of metastable GaAs1-xBix alloy
    Oe, K
    JOURNAL OF CRYSTAL GROWTH, 2002, 237 : 1481 - 1485