Metalorganic vapor phase epitaxial growth of GaNAs using tertiarybutylarsine (TBA) and dimethylhydrazine (DMHy)

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作者
Moto, Akihiro [1 ]
Tanaka, So [1 ]
Ikoma, Nobuyuki [2 ]
Tanabe, Tatsuya [1 ]
Takagishi, Shigenori [1 ]
Takahashi, Mitsuo [2 ]
Katsuyama, Tsukuru [2 ]
机构
[1] Basic High-Technology Laboratories, Sumitomo Electric Industries, Ltd., 1-1-1 Koya-kita, Itami, Hyogo 664-0016, Japan
[2] Optoelectronics R and D Laboratories, Sumitomo Electric Industries, Ltd., I Taya-cho, Sakae-ku, Yokohama 244-8588, Japan
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摘要
Semiconducting gallium arsenide
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页码:1015 / 1018
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