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- [3] Understanding EUV mask blank surface roughness induced LWR and associated roughness requirement EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY VI, 2015, 9422
- [4] Impact of mask blank and mirror surface roughness on actinic EUVL mask blank inspection signal PHOTOMASK AND NEXT-GENERATION LITHOGRAPHY MASK TECHNOLOGY XV, PTS 1 AND 2, 2008, 7028
- [5] SURFACE-ROUGHNESS IN PLASTIC WORKING JOURNAL OF JAPAN SOCIETY OF LUBRICATION ENGINEERS, 1974, 19 (02): : 155 - 162
- [7] Tool And Blank Interaction In The Cross-Die Forming Process International Journal of Material Forming, 2008, 1 : 161 - 164
- [8] Internal surface roughness of plastic pipes for irrigation REVISTA BRASILEIRA DE ENGENHARIA AGRICOLA E AMBIENTAL, 2017, 21 (03): : 143 - 149
- [10] SURFACE-ROUGHNESS AND ELASTIC AND PLASTIC CONTACTS JOURNAL OF JAPAN SOCIETY OF LUBRICATION ENGINEERS, 1974, 19 (02): : 135 - 145