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Solid-phase epitaxial regrowth and dopant activation of P-implanted metastable pseudomorphic Ge0.12Si0.88 on Si(100)
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Lie, D.Y.C.
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Lie, D.Y.C.
Theodore, N.D.
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Theodore, N.D.
Song, J.H.
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Song, J.H.
Nicolet, M.-A.
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Nicolet, M.-A.
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1600年
/ American Inst of Physics, Woodbury, NY, USA卷
/ 77期
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