ELECTRICAL CHARACTERISTICS OF BE-IMPLANTED GAAS ACTIVATED BY RAPID THERMAL ANNEALING.

被引：0

作者：

Maezawa, Koichi ^{[1
]}

Oe, Kunishige ^{[1
]}

机构：

[1] NTT, Atsugi, Jpn, NTT, Atsugi, Jpn

来源：

Electron device letters | 1986年 / EDL-7卷 / 01期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

SEMICONDUCTING GALLIUM ARSENIDE

引用

页码：13 / 15

共 50 条

[21] ANNEALING STUDIES OF BE-IMPLANTED GAAS0.6P0.4
MCLEVIGE, WV
VAIDYANATHAN, KV
STREETMAN, BG
COMAS, J
PLEW, L
JOURNAL OF ELECTRONIC MATERIALS, 1978, 7 (04) : 547 - 558
[22] ELECTRICAL CHARACTERISTICS OF BE-IMPLANTED GAAS DIODES ANNEALED WITH AN ULTRAHIGH POWER ARGON ARC LAMP
TABATABAIEALAVI, K
MASUM, ANM
KANBE, CH
FONSTAD, CG
GELPEY, JC
APPLIED PHYSICS LETTERS, 1983, 43 (07) : 647 - 649
[23] INFRARED RAPID THERMAL ANNEALING OF SI-IMPLANTED GAAS
KUZUHARA, M
KOHZU, H
TAKAYAMA, Y
APPLIED PHYSICS LETTERS, 1982, 41 (08) : 755 - 758
[24] REVIEW OF RAPID THERMAL ANNEALING OF ION-IMPLANTED GAAS
GILL, SS
SEALY, BJ
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (12) : 2590 - 2596
[25] TEMPERATURE TRANSIENTS OF ION-IMPLANTED SILICON WAFERS DURING RAPID THERMAL ANNEALING.
Uoochi, Yasuo
Shioya, Yoshimi
Maeda, Mamoru
Journal of the Electrochemical Society, 1987, 134 (08) : 2007 - 2010
[26] STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF GE AND SE IMPLANTED INP AFTER RAPID THERMAL ANNEALING
KRINGHOJ, P
HANSEN, JL
SHIRYAEV, SY
JOURNAL OF APPLIED PHYSICS, 1992, 72 (06) : 2249 - 2255
[27] ELECTRICAL-PROPERTIES OF BE-IMPLANTED GAAS1-XPX
CHATTERJEE, PK
MCLEVIGE, WV
STREETMAN, BG
SOLID-STATE ELECTRONICS, 1976, 19 (11) : 961 - 964
[28] FORMATION OF TITANIUM SILICIDE BY RAPID THERMAL ANNEALING.
Pramanik, D.
Deal, M.
Saxena, A.N.
Wu, Owen K.T.
1985, (08)
[29] ELECTRICAL-PROPERTIES OF S-IMPLANTS IN GAAS ACTIVATED BY INFRARED RAPID THERMAL ANNEALING
KUZUHARA, M
KOHZU, H
TAKAYAMA, Y
JOURNAL OF APPLIED PHYSICS, 1983, 54 (06) : 3121 - 3124
[30] ELECTRICAL-PROPERTIES OF RAPID THERMAL ANNEALED IMPLANTED GAAS
GRNO, J
EPM 87: ENERGY PULSE AND PARTICLE BEAM MODIFICATION OF MATERIALS, 1988, 8 : 193 - 195

← 1 2 3 4 5 →