Elastic modulus of amorphous carbon films

被引：0

作者：

Schultrich, B. ^{[1
]}

Scheibe, H.-J. ^{[1
]}

Grandremy, G. ^{[1
]}

Schneider, D. ^{[1
]}

机构：

[1] Fraunhofer-Inst for Material Physics, and Thin Film Engineering, Dresden, Germany

来源：

Physica Status Solidi (A) Applied Research | 1994年 / 145卷 / 02期

关键词：

Amorphous films;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：385 / 392

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