Elastic modulus of amorphous carbon films

被引：0
|
作者：
Schultrich, B. [1 ]
Scheibe, H.-J. [1 ]
Grandremy, G. [1 ]
Schneider, D. [1 ]
机构：
[1] Fraunhofer-Inst for Material Physics, and Thin Film Engineering, Dresden, Germany
来源：
Physica Status Solidi (A) Applied Research | 1994年 / 145卷 / 02期
关键词：
Amorphous films;
D O I：
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中图分类号：
学科分类号：
摘要：
引用
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页码：385 / 392
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