High precision laser deep-hole diameter measurement based on dynamic Abbe's principle

被引：0
|
作者：
Ye, Shu-Liang [1 ]
Tan, Jiu-Bin [1 ]
机构：
[1] Inst. of Ultra Precision Optical, Harbin Inst. of Technol., Harbin 150001, China
来源：
Guangdianzi Jiguang/Journal of Optoelectronics Laser | 2004年 / 15卷 / 08期
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D O I：
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学科分类号：
摘要：
9
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页码：971 / 974
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