Influence of cesium vapor on the properties of ITO films deposited by RF magnetron sputtering

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[1] Lee, Shih-Nan
[2] Yan, Ruei-Chih
[3] Chen, Chin H.
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Chen, C.H. | / National Chiao Tung University, Taiwan; Air Force Office of Scientific Research; Color Imaging Industry Promotion Office/Industrial Dev. Bureau; Electronics Research and Service Organization; Ministry of Education; et al卷 / Society for Information Display期
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