AUTOMATIC REGISTRATION OF SCANNING ELECTRON MICROSCOPE IMAGES.

被引：0
|
作者：
Stentiford, F.W.M. [1 ]
Twell, T.J. [1 ]
机构：
[1] British Telecom Research Lab, Ipswich, Engl, British Telecom Research Lab, Ipswich, Engl
来源：
Microelectronic Engineering | 1987年 / 7卷 / 2-4期
关键词：
AUTOMATIC BEAM PLACEMENT - EDGE MATCHING ALGORITHM - ELECTRON BEAM TEST SYSTEM - SEM IMAGE AUTOMATIC REGISTRATION;
D O I：
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学科分类号：
摘要：
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页码：215 / 221
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