Structural characterization of a Mo/Ru/Si extreme ultraviolet (EUV) reflector by optical modeling

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[1] Kang, In-Yong
[2] Kim, Tae Geun
[3] Lee, Seung Yoon
[4] Ahn, Jinho
[5] Chung, Yong-Chae
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Kang, I.-Y. | 1600年 / Japan Society of Applied Physics卷 / 43期
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