Particle growth kinetics in silane RF discharges

被引：0
|
作者：
Shiratani, Masaharu [1 ]
Fukuzawa, Tsuyoshi [1 ]
Watanabe, Yukio [1 ]
机构：
[1] Dept. of Electron. Device Eng., Grad. Sch. Info. Sci. and Elec. Eng., Kyushu University, Hakozaki, Fukuoka 812-8581, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 7 B期
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页码：4542 / 4549
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