Basic concept of feature-based metrology

被引：0

作者：

Takamasu, Kiyoshi ^{[1
]}

Furutani, Ryoshu ^{[2
]}

Ozono, Shigeo ^{[1
]}

机构：

[1] Department of Precision Engineering, Fac. Eng., Univ. Tokyo, 7-3-1 H., Tokyo, Japan

[2] Dept. of Prec. Machinery Engineering, Tokyo Denki University, Tokyo, Japan

来源：

Measurement: Journal of the International Measurement Confederation | 1999年 / 26卷 / 03期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：151 / 156

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