Basic concept of feature-based metrology

被引：0
|
作者：
Takamasu, Kiyoshi [1 ]
Furutani, Ryoshu [2 ]
Ozono, Shigeo [1 ]
机构：
[1] Department of Precision Engineering, Fac. Eng., Univ. Tokyo, 7-3-1 H., Tokyo, Japan
[2] Dept. of Prec. Machinery Engineering, Tokyo Denki University, Tokyo, Japan
来源：
Measurement: Journal of the International Measurement Confederation | 1999年 / 26卷 / 03期
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页码：151 / 156
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