Chemical vapor deposited copper from alkyne stabilized copper (I) hexafluoroacetylacetonate complexes

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[1] Baum, Thomas H.

[2] Larson, Carl E.

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Baum, Thomas H. | 1600年 / 140期

关键词：

Alkyne stabilized copper complexes - Chemical vapor deposited copper - Hexafluoroacetylacetonate complexes;

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[31] Copper chemical vapor deposition films deposited from Cu(1,1,1,5,5,5-hexafluoroacetylacetonate) vinyltrimethylsilane
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