Electrochemical aspects of corrosion resistance and etching of metallizations for microelectronics

被引：0

作者：

Comizzoli, R.B. ^{[1
]}

Frankenthal, R.P. ^{[1
]}

Hanson, K.J. ^{[1
]}

Konstadinidis, K. ^{[1
]}

Opila, R.L. ^{[1
]}

Sapjeta, J. ^{[1
]}

Sinclair, J.D. ^{[1
]}

Takahashi, K.M. ^{[1
]}

Frank, A.L. ^{[1
]}

Ibidunni, A.O. ^{[1
]}

机构：

[1] AT&T Bell Lab, Murray Hill, United States

来源：

Materials Science and Engineering A | 1995年 / A198卷 / 1-2期

关键词：

Etching;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：153 / 160

共 50 条

[1] ELECTROCHEMICAL ASPECTS OF CORROSION-RESISTANCE AND ETCHING OF METALLIZATIONS FOR MICROELECTRONICS
COMIZZOLI, RB
FRANKENTHAL, RP
HANSON, KJ
KONSTADINIDIS, K
OPILA, RL
SAPJETA, J
SINCLAIR, JD
TAKAHASHI, KM
FRANK, AL
IBIDUNNI, AO
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1995, 198 (1-2): : 153 - 160
[2] Electrochemical aspects of new materials and technologies in microelectronics
Dubin, VM
MICROELECTRONIC ENGINEERING, 2003, 70 (2-4) : 461 - 469
[3] A micromechanical model for coupled interaction of thermo mechanical and corrosion fatigue in microelectronics thin-film metallizations
Shodja, HM
SURFACE TREATMENT V: COMPUTER METHODS AND EXPERIMENTAL MEASUREMENTS, 2001, 6 : 429 - 438
[4] SOME ASPECTS OF CORROSION OF TITANIUM-BASED METALLIZATIONS FOR INTEGRATED-CIRCUITS
MACARTHU.DM
JOURNAL OF ELECTRONIC MATERIALS, 1974, 3 (04) : 860 - 860
[5] ELECTROCHEMICAL ASPECTS OF STRESS CORROSION
PRIEST, DK
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1959, 106 (04) : 358 - 360
[6] ELECTROCHEMICAL ASPECTS OF PITTING CORROSION
ROSENFEL.IL
DANILOV, IS
CORROSION SCIENCE, 1967, 7 (03) : 129 - &
[7] Electrochemical etching for micromachining of corrosion resistant alloys
Mineta, T
BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2003, : 1542 - 1545
[8] Cyanide- and thiourea-free electrochemical etching of gold for microelectronics applications
Hu, Zhongmin
Ritzdorf, Tom
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2007, 154 (10) : D543 - D549
[9] CORROSION FAILURE MECHANISMS FOR GOLD METALLIZATIONS
FRANKENTHAL, RP
BECKER, WH
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : C359 - C359
[10] ELECTROCHEMICAL AND CHEMICAL ASPECTS OF LOCALIZED CORROSION
FUJII, CT
REPORT OF NRL PROGRESS, 1971, (NAUG): : 28 - &

← 1 2 3 4 5 →