SIMS characterization of noble metal-based thin film electrodes

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Istituto di Polarografia ed, Elettrochimica Preparativa del CNR, Padova, Italy [1 ]
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Mater Sci Forum | / pt 2卷 / 625-630期
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Iridium compounds - Oxides - Ruthenium compounds - Secondary ion mass spectrometry - Thin film devices - Thin films - Titanium dioxide;
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摘要
The influence of the support material on the formation of TiO2 from the isopropanolic solution of titanium diisopropoxide bis-2,4-pentanedionate on titanium and nickel supports was investigated by Secondary Ion Mass Spectrometry. It was found that the support material strongly influences the penetration characteristics of titania, and via this the structure of the coating-support interface. The penetration of TiO2 into the support is also influenced by the nature of the noble metal oxide in mixed oxide systems. Concentration depth profiles showed that titania can penetrate deeper into titanium metal in the presence of RuO2, while IrO2 showed a definite hindering effect.
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