Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition

被引：0
|
作者：
Lee, Kwang-Ryeol [1 ]
Kim, Myoung-Geun [1 ]
Cho, Sung-Jin [1 ]
Eun, Kwang Yong [1 ]
Seong, Tae-Yeon [1 ]
机构：
[1] Korea Inst of Science and Technology, Seoul, Korea, Republic of
来源：
Thin Solid Films | 1997年 / 308-309卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：263 / 267
相关论文
共 50 条
  • [21] OPTICAL-EMISSIONS DURING PLASMA-ASSISTED CHEMICAL-VAPOR-DEPOSITION OF DIAMOND-LIKE CARBON-FILMS
    DEBROY, T
    KUMAR, S
    TANKALA, K
    DIAMOND AND RELATED MATERIALS, 1994, 4 (01) : 69 - 75
  • [22] Characterisation of nitrogen modified diamond-like carbon films deposited by radio-frequency plasma enhanced chemical vapour deposition
    Dorner-Reisel, A
    Kübler, L
    Irmer, G
    Reisel, G
    Schöps, S
    Klemm, V
    Müller, E
    DIAMOND AND RELATED MATERIALS, 2005, 14 (3-7) : 1073 - 1077
  • [23] The structure and properties of amorphous diamond-like carbon films deposited by helicon wave plasma chemical vapor deposition
    Chen, Jia-li
    Ji, Pei-yu
    Yang, Yan
    Jin, Cheng-gang
    Zhuge, Lan-jian
    Wu, Xue-mei
    THIN SOLID FILMS, 2020, 709
  • [24] Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source
    Kahn, Markus
    Cekada, Miha
    Schoeberl, Thomas
    Berghauser, Roswitha
    Mitterer, Christian
    Bauer, Christoph
    Waldhauser, Wolfgang
    Brandstaetter, Elmar
    THIN SOLID FILMS, 2009, 517 (24) : 6502 - 6507
  • [25] Diamond-like carbon films deposited by electron beam excited plasma chemical vapor deposition
    Ban, M
    Ryoji, M
    Hasegawa, T
    Mori, Y
    Fujii, S
    Fujioka, J
    DIAMOND AND RELATED MATERIALS, 2002, 11 (07) : 1353 - 1359
  • [26] Diamond-like carbon films deposited on polycarbonates by plasma-enhanced chemical vapor deposition
    Guo, C. T.
    THIN SOLID FILMS, 2008, 516 (12) : 4053 - 4058
  • [27] Microstructural and frictional control of diamond-like carbon films deposited on acrylic rubber by plasma assisted chemical vapor deposition
    Martinez-Martinez, D.
    Schenkel, M.
    Pei, Y. T.
    De Hosson, J. Th. M.
    THIN SOLID FILMS, 2011, 519 (07) : 2213 - 2217
  • [28] Diamond-like carbon films deposited on polymers by plasma-enhanced chemical vapor deposition
    Cuong, NK
    Tahara, M
    Yamauchi, N
    Sone, T
    SURFACE & COATINGS TECHNOLOGY, 2003, 174 : 1024 - 1028
  • [29] Deposition of silicon-containing diamond-like carbon films by plasma-enhanced chemical vapour deposition
    Baba, K.
    Hatada, R.
    Flege, S.
    Ensinger, W.
    SURFACE & COATINGS TECHNOLOGY, 2009, 203 (17-18): : 2747 - 2750
  • [30] Mechanical and tribological properties of Ar incorporated diamond-like carbon films
    Zhang, W
    Tanaka, A
    Wazumi, K
    Koga, Y
    THIN SOLID FILMS, 2002, 416 (1-2) : 145 - 152
12345