Structural dependence of mechanical properties of Si incorporated diamond-like carbon films deposited by RF plasma-assisted chemical vapour deposition

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作者：
Lee, Kwang-Ryeol [1 ]
Kim, Myoung-Geun [1 ]
Cho, Sung-Jin [1 ]
Eun, Kwang Yong [1 ]
Seong, Tae-Yeon [1 ]
机构：
[1] Korea Inst of Science and Technology, Seoul, Korea, Republic of
来源：
Thin Solid Films | 1997年 / 308-309卷
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页码：263 / 267
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