Heteroepitaxial growth of PZT film on (100)Ir/(100)YSZ/(100)Si substrate structure prepared by reactive sputtering

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作者：
Horita, Susumu [1 ]
Horii, Sadayoshi [2 ]
机构：
[1] Japan Advanced Inst of Science and Technology, School of Material Science, Ishikawa, Japan
[2] Delegated from Kokusai Electric Co.,Ltd, Toyama, Japan
来源：
Materials Research Society Symposium - Proceedings | 1999年 / 541卷
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摘要：
16
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页码：351 / 356
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