High-speed, high-accuracy optical measurements of polycrystalline silicon for process control

被引：0
|
作者：
Benson, Tyrone E. [1 ]
Ramamoorthy, Arun [1 ]
Kamlet, Leonard I. [1 ]
Terry Jr., Fred L. [1 ]
机构：
[1] Univ of Michigan, Ann Arbor, United States
来源：
Thin Solid Films | 1998年 / 313-314卷 / 1-2期
关键词：
Number:; 96-MC-085; Acronym:; SRC; Sponsor: Semiconductor Research Corporation; -;
D O I：
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学科分类号：
摘要：
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页码：435 / 441
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