High depth resolution Rutherford backscattering analysis of Si-Si0.78Ge0.22/(0 0 1)Si superlattices

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作者：
Barradas, N.P. [1 ]
Jeynes, C. [1 ]
Mironov, O.A. [1 ]
Phillips, P.J. [1 ]
Parker, E.H.C. [1 ]
机构：
[1] Univ of Surrey, Surrey, United Kingdom
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1998年 / 139卷 / 1-4期
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页码：239 / 243
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