Tip-scanning dynamic force microscope using piezoelectric cantilever for full wafer inspection

被引：0
|
作者：
Chu, Jiaru [1 ]
Maeda, Ryutaro [1 ]
Itoh, Toshihiro [2 ]
Suga, Tadatomo [2 ]
机构：
[1] Mechanical Engineering Laboratory, Agy. of Indust. Sci. and Technology, Min. of Intl. Trade and Industry, 1-2 Namiki, Tsukuba, Ibaraki 305-0044, Japan
[2] Res. Ctr. for Adv. Sci. and Technol., University of Tokyo, Komaba 4-6-1, Meguro-ku, Tokyo 153-0041, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1999年 / 38卷 / 12 B期
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页码：7155 / 7158
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