LASER-ASSISTED OXIDATION OF METALLIC FILMS ON INSULATORS.

被引：0
|
作者：
Wautelet, M. [1 ]
Andrew, R. [1 ]
机构：
[1] Univ de l'Etat, Mons, Belg, Univ de l'Etat, Mons, Belg
来源：
Philosophical Magazine B: Physics of Condensed Matter; Electronic, Optical and Magnetic Properties | 1986年 / 55卷 / 02期
关键词：
CHEMICAL REACTIONS - Reaction Kinetics - COPPER AND ALLOYS - Oxidation - FILMS - Metallic - LASER BEAMS - Applications - RADIATION EFFECTS;
D O I：
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中图分类号：
学科分类号：
摘要：
When metallic films are irradiated in air by means of powerful laser beams, oxidation takes place. Features specific to the mechanisms of laser-matter interaction are observed which are not found under furnace-annealing conditions. Two such features are described in this paper. Laser-induced oxidation of thin cadmium films on glass substrates indicates that oxidation accelerates when the metallic film (below a solid oxide film) rapidly melts. In the case of copper films, feedback effects between laser energy absorption and film temperature give rise to oscillating oxidation rates.
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页码：261 / 269
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