Particle behavior in vacuum systems: Implications for in-situ particle monitoring in semiconductor processing equipment

被引：0
|
作者：
Kinney, Patrick D. [1 ]
Bae, Gwi-Nam [1 ]
Pui, David Y.H. [1 ]
Liu, Benjamin Y.H. [1 ]
机构：
[1] Univ of Minnesota, Minneapolis, United States
来源：
Journal of the IES | 1996年 / 39卷 / 06期
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页码：40 / 45
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