INITIAL STAGE OF LASER-INDUCED SELECTIVE CHEMICAL VAPOR DEPOSITION OF SILICON.

被引：0
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作者：
Tanaka, Takeshi [1 ]
Deguchi, Koji [1 ]
Hirose, Masataka [1 ]
机构：
[1] Hiroshima Univ, Higashihiroshima, Jpn, Hiroshima Univ, Higashihiroshima, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1987年 / 26卷 / 12期
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页码：2057 / 2060
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