Effect of laser-induced dissociation during measurements of hydrogen atoms in silane plasmas using two-photon-excited laser-induced fluorescence

被引：0

作者：

机构：

[1] Park, Won Zoo

[2] Tanigawa, Manabu

[3] Kajiwara, Toshinori

[4] Muraoka, Katsunori

[5] Masuda, Mitsuharu

[6] Okada, Tatsuo

[7] Maeda, Mitsuo

[8] Suzuki, Atsushi

[9] Matsuda, Akihisa

来源：

Park, Won Zoo | 1600年 / 31期

关键词：

Hydrogen atom density distribution - Laser induced dissociation - Lyman beta transition - Silane plasmas - Two photon excitation;

D O I：

暂无

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摘要：

During measurements of atomic hydrogen in a silane plasma using two-photon-excited laser-induced fluorescence, laser-induced dissociation of the gas was observed. This was investigated until conditions for the input laser fluence were determined where the effect was negligible. A measurement of the atomic hydrogen distribution was then performed within the limits of these conditions.

引用

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