Micro hot embossing for replication of micro structures

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[1] [1,Shan, X.C.
[2] Murakoshi, Y.
[3] Maeda, R.
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Shan, X.C. (maeda-ryutaro@aist.go.jp) | 2002年 / The Japan Society of Applied Physics卷 / Institute of Electrical and Electronics Engineers Inc., United States期
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