Ion energy distribution of 13.56 MHz rf glow discharges in a planar system cathode

被引：0
|
作者：
机构：
[1] Otsubo, Toru
[2] Ohara, Kazuhiro
来源：
Otsubo, Toru | 1882年 / 30期
关键词：
Ions;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Optical and Glow Diagnostics of 13.56-MHz RF Plasma-PVDF Membrane Surface Interactions
    Huang, Chun
    Tsai, Ching-Yuan
    Ma, Wei-Chun
    Lai, Kuan-Ying
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2014, 42 (10) : 2568 - 2569
  • [22] Ion energy distribution measurements in rf and pulsed dc plasma discharges
    Gahan, D.
    Daniels, S.
    Hayden, C.
    Scullin, P.
    O'Sullivan, D.
    Pei, Y. T.
    Hopkins, M. B.
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 2012, 21 (02):
  • [23] Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases
    Fedosenko, G
    Schwabedissen, A
    Korzec, D
    Engemann, J
    SURFACE & COATINGS TECHNOLOGY, 2001, 142 : 693 - 697
  • [24] CALCULATION OF ION ENERGY-DISTRIBUTIONS IN LOW-FREQUENCY RF GLOW-DISCHARGES
    JAMES, AS
    MATTHEWS, A
    SURFACE & COATINGS TECHNOLOGY, 1993, 59 (1-3): : 86 - 90
  • [25] Investigation of the electron energy distribution function in hollow-cathode glow discharges in nitrogen and oxygen
    Bazhenov, VY
    Ryabtsev, AV
    Soloshenko, IA
    Terent'eva, AG
    Khomich, VA
    Tsiolko, VV
    Shchedrin, AI
    PLASMA PHYSICS REPORTS, 2001, 27 (09) : 813 - 818
  • [26] Investigation of the electron energy distribution function in hollow-cathode glow discharges in nitrogen and oxygen
    V. Yu. Bazhenov
    A. V. Ryabtsev
    I. A. Soloshenko
    A. G. Terent'eva
    V. A. Khomich
    V. V. Tsiolko
    A. I. Shchedrin
    Plasma Physics Reports, 2001, 27 : 813 - 818
  • [27] Spatial distribution of electron characteristic in argon rf glow discharges
    Zhu Zu-Song
    Lin Kui-Xun
    Lin Xuan-Ying
    Qiu Gui-Ming
    Yu Yun-Peng
    Luo Yi-Lin
    CHINESE PHYSICS, 2006, 15 (05): : 969 - 974
  • [28] INFLUENCE OF AR METASTABLE ON THE DISCHARGE STRUCTURE IN AR AND NA MIXTURE IN RF DISCHARGES AT 13.56-MHZ
    TOCHIKUBO, F
    PETROVIC, ZL
    KAKUTA, S
    NAKANO, N
    MAKABE, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1994, 33 (7B): : 4271 - 4275
  • [29] Spatial profile measurements of charged particles in capacitively-coupled RF (13.56 MHz) oxygen discharges
    Kaga, K
    Kimura, T
    Ohe, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (01): : 330 - 331
  • [30] Tailoring surface properties of polyethylene separator by low pressure 13.56 MHz RF oxygen plasma glow discharge
    Li, Chun
    Liang, Chia-Han
    Huang, Chun
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2016, 55 (01)
12345