New method for the detection of native oxide on Si with combined use of 16O(α,α)16O resonance and channeling

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作者：
Watamori, Michio [1 ]
Maeda, Yasuhiro [1 ]
Kubo, Osamu [1 ]
Oura, Kenjiro [1 ]
机构：
[1] Osaka Univ, Osaka, Japan
来源：
Applied Surface Science | 1997年 / 113-114卷
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Number:; -; Acronym:; MEXT; Sponsor: Ministry of Education; Culture; Sports; Science and Technology;
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页码：403 / 407
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