ELECTRICAL PROPERTIES OF THIN CARBON FILMS OBTAINED BY R. F. METHANE DECOMPOSITION ON AN R. F. -POWERED NEGATIVELY SELF-BIASED ELECTRODE.

被引：0
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作者：
Has, Z. [1 ]
Mitura, S. [1 ]
Clapa, M. [1 ]
Szmidt, J. [1 ]
机构：
[1] Technical Univ of Lodz, Lodz, Pol, Technical Univ of Lodz, Lodz, Pol
来源：
| 1600年 / 136期
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摘要：
CARBON
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