LIMITS OF HIGH-SPEED e-BEAM TESTING.

被引：10
|
作者：
Lischke, Burkhard [1 ]
Winkler, D. [1 ]
Schmitt, R. [1 ]
机构：
[1] Siemens AG, Munich, West Ger, Siemens AG, Munich, West Ger
来源：
Microelectronic Engineering | 1987年 / 7卷 / 01期
关键词：
This work has been partially supported by the EEC's ESPRIT program (project No. 843). The authors alone are responsible for the content;
D O I：
10.1016/0167-9317(87)90004-9
中图分类号：
学科分类号：
摘要：
29
引用
收藏
页码：21 / 39
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