Observation of an inductively coupled RF discharge with one-turn internal antenna

被引：0
|
作者：
Cicman, Peter [1 ]
Fujita, Hiroharu [1 ]
机构：
[1] Dept. of Elec. and Electronic Eng., Saga University, Honjo-Machi 1, Saga 840-8502, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 5 A期
关键词：
Antenna coils - High energy electrons;
D O I：
10.1143/jjap.41.3114
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3114 / 3119
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