PLASMA ASSISTED GROWTH OF THIN OXYNITRIDE FILMS.

被引：0
|
作者：
Graham, W.K. [1 ]
Alderman, J.C. [1 ]
机构：
[1] Plessey Research (Caswell) Ltd,, Allen Clark Research Cent,, Towcester, Engl, Plessey Research (Caswell) Ltd, Allen Clark Research Cent, Towcester, Engl
来源：
Physica B: Physics of Condensed Matter & C: Atomic, Molecular and Plasma Physics, Optics | 1984年 / 129 B-C卷 / 1-3期
关键词：
OXYNITRIDE FILMS - SPUTTER PROFILES - THERMAL OXIDE GROWTH;
D O I：
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学科分类号：
摘要：
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页码：224 / 228
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