Multifunction scanning probe microscope with needle sensor

被引：0
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作者：
Wang, Xuefang
Zhang, Honghai
Wang, Sheng
Xu, Long
机构：
来源：
Huazhong Ligong Daxue Xuebao/Journal Huazhong (Central China) University of Science and Technology | 2000年 / 28卷 / 05期
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摘要：
A complicated cantilever and optical detection device are placed by 1 MHz quartz resonator in SPM. It made SPM simple and cheap. It is shown that this measurement method is feasible. STM, AFM, MFM and EFM is integrated on a single instrument for many parameters measurement by changing the tip and some modules.
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