Electrical and structural properties of the Si/C interface in poly-Si thin films on graphite substrates

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作者
Reindl, T. [1 ]
Kruehler, W. [1 ]
Pauli, M. [1 ]
Mueller, J. [1 ]
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[1] Siemens AG, Munich, United States
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11
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页码:127 / 135
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