Epitaxial growth of a (100) CoSi2 layer from carbonic cobalt films deposited on (100) Si substrate using an organometallic source

被引：0
|
作者：
机构：
来源：
Appl Phys Lett | / 7卷 / 1003期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] EPITAXIAL COSI2 FILMS ON SI(100) BY SOLID-PHASE REACTION
    VANTOMME, A
    NICOLET, MA
    THEODORE, ND
    JOURNAL OF APPLIED PHYSICS, 1994, 75 (08) : 3882 - 3891
  • [22] Hetero-epitaxial growth of CoSi2 thin films on Si(100):: template effects and epitaxial orientations
    Buschmann, V
    Rodewald, M
    Fuess, H
    Van Tendeloo, G
    Schaffer, C
    JOURNAL OF CRYSTAL GROWTH, 1998, 191 (03) : 430 - 438
  • [23] Epitaxial CoSi2 on Si(100) by oxide mediated epitaxy
    Kleinschmit, MW
    Yeadon, M
    Gibson, JM
    ADVANCED MICROELECTRONIC PROCESSING TECHNIQUES, 2000, 4227 : 9 - 13
  • [24] EPITAXIAL-GROWTH OF COSI2 FILMS ON SI
    SAITOH, S
    ISHIWARA, H
    FURUKAWA, S
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (03) : C95 - C95
  • [25] Structural investigations in the formation of the epitaxial CoSi2 layer using a Co/TiSix bilayer on Si (100)
    Jeong, JJ
    Ghosh, S
    Lim, J
    Lee, C
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2002, 96 (03): : 240 - 246
  • [26] EPITAXIAL ORIENTATION AND MORPHOLOGY OF THIN COSI2 FILMS GROWN ON SI(100) - EFFECTS OF GROWTH-PARAMETERS
    YALISOVE, SM
    TUNG, RT
    LORETTO, D
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03): : 1472 - 1474
  • [27] Epitaxial CoSi2 formation by Co/Hf bilayers on Si(100)
    Gebhardt, B
    Falke, M
    Giesler, H
    Teichert, S
    Beddies, G
    Hinneberg, HJ
    MICROELECTRONIC ENGINEERING, 1997, 37-8 (1-4) : 483 - 490
  • [28] FORMATION OF EPITAXIAL COSI2 ON SI(100) - ROLE OF THE ANNEALING AMBIENT
    VANTOMME, A
    NICOLET, MA
    BAI, G
    FRASER, DB
    APPLIED PHYSICS LETTERS, 1993, 62 (03) : 243 - 245
  • [29] Nanometer patterning of epitaxial CoSi2/Si(100) by local oxidation
    Zhao, QT
    Dolle, M
    Kappius, L
    Klinkhammer, F
    Mesters, S
    Mantl, S
    SOLID-STATE ELECTRONICS, 1999, 43 (06) : 1091 - 1094
  • [30] Self-assembled epitaxial CoSi2/Si(100) nanostructures
    Kluth, P
    Zhao, QT
    Winnerl, S
    Lenk, S
    Mantl, S
    SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 483 - 485
12345