共 16 条
- [13] Numerical Modeling of an Ar–H2 Radio-Frequency Plasma Reactor under Thermal and Chemical Nonequilibrium Conditions Plasma Chemistry and Plasma Processing, 2007, 27 : 189 - 204
- [14] Plasma-dynamic and optical characteristics of magnetron-type cylindrical gas discharge under conditions of titanium nitride film synthesis Technical Physics, 2009, 54 : 1052 - 1057