Superhard carbon deposited by pulsed High-Current Arc as protective nanocoating for magnetic hard disks

被引：0
|
作者：
Neuhäuser, M. [1 ]
Hilgers, H. [1 ]
Witke, T. [1 ]
Siemroth, P. [1 ]
机构：
[1] IBM Mainz, Abteilung 4627, Hechtsheimerstr. 2, 55131 Mainz, Germany
来源：
Vakuum in Forschung und Praxis | 2001年 / 13卷 / 04期
关键词：
539.2.2 Protecting Materials - 722.1 Data Storage; Equipment and Techniques - 804 Chemical Products Generally - 931.2 Physical Properties of Gases; Liquids and Solids - 933.2 Amorphous Solids;
D O I：
10.1002/1522-2454(200108)13:43.0.CO;2-B
中图分类号：
学科分类号：
摘要：
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页码：215 / 220
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