Ion beam induced diffusion and crystallization in high-dose Er implanted Si

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作者：
Golanski, A.
Christie, W.H.
Galloway, M.D.
Park, J.L.
Pennycook, S.J.
Poker, D.B.
Moore, J.L.
Harmon, H.E.
White, C.W.
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Nuclear Instruments & Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1991年 / 59-60卷 / pt 1期
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