Design considerations for thin-film embedded resistor and capacitor technologies

被引：7
|
作者：
Chinoy, Percy [1 ]
Langlois, Marc [2 ]
Hariharan, Raj [2 ]
Nelson, Mike [2 ]
Cox, Anthony [2 ]
Ridler, Tony [3 ]
机构：
[1] Rohm/Haas Electronic Materials LLC, Marlborough, MA, United States
[2] Rohm/Haas Electronic Materials LLC, Norcross, GA, United States
[3] Rohm/Haas Electron. Mat. Europe Ltd., Coventry, United Kingdom
来源：
Circuit World | 2005年 / 31卷 / 01期
关键词：
D O I：
10.1108/03056120510553194
中图分类号：
学科分类号：
摘要：
Thin films
引用
收藏
页码：21 / 27
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