In-situ measurement of sputtering yield of graphite by VUV laser fluorescence spectroscopy

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作者：
Kajiwara, Toshinori [1 ]
Matsuda, Yoshinobu [1 ]
Muraoka, Katsunori [1 ]
Okada, Tatsuo [1 ]
Maeda, Mitsuo [1 ]
Akazaki, Masanori [1 ]
机构：
[1] Kyushu Univ, Japan
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| 1600年 / 27 pt 1期
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