Increase of efficiency for the XeCl excimer laser ablation of ceramics

被引：0
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作者：
Geiger, M. [1 ]
Becker, W. [1 ]
Rebhan, T. [1 ]
Hutfless, J. [1 ]
Lutz, N. [1 ]
机构：
[1] Univ of Erlangen-Nuremberg, Erlangen, Germany
来源：
Applied Surface Science | 1996年 / 96-98卷
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页码：309 / 315
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