Effect of intrinsic stress on preferred orientation in AlN thin films

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[1] Gan, B.K.
[2] Bilek, M.M.M.
[3] McKenzie, D.R.
[4] Taylor, M.B.
[5] McCulloh, D.G.
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Gan, B.K. (bkgan@physics.usyd.edu.au) | 1600年 / American Institute of Physics Inc.卷 / 95期
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