Optical thickness evaluation of separation by IMplanted OXygen (SIMOX) wafers

被引：0
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作者：
Kajiyama, Kenji [1 ]
Morikawa, Yoji [1 ]
Hamaguchi, Iaso [1 ]
Yano, Takayuki [1 ]
机构：
[1] Nippon Steel Corp, Sagamihara, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1996年 / 35卷 / 2 A期
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页码：526 / 532
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