Analysis of unsteady heat and mass transfer during the modified chemical vapor deposition process

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作者
Park, K.S. [2 ]
Choi, M. [1 ,2 ]
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[1] ASME
[2] Department of Mechanical Engineering, Seoul National University, Seoul 151-742, Korea, Republic of
来源
Journal of Heat Transfer | 1998年 / 120卷 / 04期
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页码:858 / 864
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