Development of piezoelectric XYγ positioning device using impulsive force (2nd Report) - improvement of motion characteristic with friction control

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作者：
Isobe, Hiromi
Kato, Shigeyasu
Kyusojin, Akira
Moriguti, Takanari
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Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 1998年 / 64卷 / 03期
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3
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页码：408 / 412
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